The production solution has high throughput and incorporates a series of field retrofittable process modules that allow manufacturers to easily scale production either up or down, to 1,200, 2,400 or 3,600 wafers per hour.
Additional process modules make the scale-up process even more cost effective. Spacer process modules equipped with conveyors can be deployed at initial installation, then simply exchanged for additional print capacity when demand dictates eliminating the need to reconfigure the entire line to accommodate extra modules and streamlining scalability even further.
In configurations of 2,400 wafers per hour and above, the Eclipse deploys multiple print heads that function independently in parallel, ensuring that if one head halts for operator attention, the others continue to print thereby eliminating downtime.
This content is protected by copyright and may not be reused. If you want to cooperate with us and would like to reuse some of our content, please contact: firstname.lastname@example.org.