Featured in Step on the gas – 12-2012

New deposition of AZO thin films

TCO layer deposition: Aluminum-doped zinc oxide (AZO) thin films have been deposited using an in-line ETP-CVD production process at Roth & Rau. ETP-CVD allows high deposition speed, reduces system size and decreases running costs. It can be applied to deposition on foils. For CIGS module production, the cost of ownership for AZO will go towards €1/m2 . Roth & Rau’s Manager of Innovations Roel Bosch provides the latest information on the deposition technology, performance and cost.

It is well known that transparent conductive oxides are used as contacts for thin film solar cells and other applications like display technologies, OLED lighting and smart glass. The ideal transparent conductive oxide (TCO) layer provides the highest optical transmission in combination with the lowest sheet resistance. In addition, it also allows for the implementation …

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