TCO layer deposition: Aluminum-doped zinc oxide (AZO) thin films have been deposited using an in-line ETP-CVD production process at Roth & Rau. ETP-CVD allows high deposition speed, reduces system size and decreases running costs. It can be applied to deposition on foils. For CIGS module production, the cost of ownership for AZO will go towards 1/m2 . Roth & Raus Manager of Innovations Roel Bosch provides the latest information on the deposition technology, performance and cost.
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