Building on their existing technology alliance, InnoLas Systems and Roth & Rau (a Member of Meyer Burger Group) are now offering a complete system solution package for PERC solar cells (Passivated Emitter and Rear Contact). It consists of a Roth & Rau MAiA PECVD system for rear surface passivation and an InnoLas ILS TT laser system for laser contact opening, both finely tuned to match each other. This package allows to improve the efficiency of standard mono-crystalline cells by up to 1%. The combination of best-in-class laser and coating technology is engineered for a throughput of 3,400 wafers per hour.
The Roth & Rau MAiA PECVD system is capable of applying the advanced AlOx passivation layer and a SiN capping layer in one single system and therefore increases process safety and eliminates the need for additional handling. The InnoLas Systems ILS TT for laser contact opening features the required laser technology, an innovative beam guiding and vision system, fully automatic calibration functions and integrated cell handling. The configuration is designed to be easily added to existing production lines.
With this package offered by Roth & Rau and InnoLas, the customers will benefit from a complete technology package for integration into a solar cell manufacturing line. InnoLas and Roth & Rau can support the customers during the process integration and start-up phase, to ensure fastest time to market and guaranteed efficiency gain.
InnoLas Systems CEO Richard Grundmüller and Roth & Rau Chief Sales Officer Thomas Hengst agree: We have conducted extensive experiments to develop an integrated system solution that is more than the sum of its parts. It provides a plug-in performance upgrade for existing solar cell production lines. The laser and coating processes are optimized to perfectly match each other. The customer gets a stable and efficient solution and fastest turn-around time, without having to worry about technology integration.
