Based on the CIGS processes, Singulus Technologies is able to provide customers all relevant lines and has gained extensive know-how to reduce the production costs together with the customers, to increase the cell performance, and to enhance cell output.
For the development of CIGS solar cells with a substrate size of 300 x 300 mm, Singulus offers a modular cluster type tool. With this machine, innovative and large-scale implementable production processes for CIGS solar cells can be developed targeting new process combinations. Many research and development areas display the demand for such cost-efficient development tools.
CISARIS Rapid Thermal Processing
The CISARIS oven from Singulus Technologies is an inline rapid thermal processing equipment, designed for the CIGSSe absorber formation on large area glass substrates. The process can safely handle the thermal processing of large glass substrates of over 1 sq. m at temperatures up to 600 °C under toxic and corrosive gas atmosphere. High heating and cooling rates, combined with an excellent temperature and gas homogeneity during all process stages are the key factors which allow the formation of an optimal CIGSSe absorber required for the production of high efficiency solar modules.
CISARIS consists of a handling station, a vacuum tight process section, and a return conveyor and is optimized for the mass production of CIS solar modules. Per year, CISARIS provides a production capacity of over 25 MWp.
Sputtering Systems
Singulus Technologies also offers new processing systems for vacuum coating CIGS thin-film solar cells. The systems respond to the demand in the photovoltaic industry for development and production tools that enhance the efficiency of thin-film solar cells, while cutting production costs by using the state-of-the-art technologies. For PV technology, Singulus develops and manufactures coating systems which can apply special layers and layer systems on different materials. Inline sputter systems are significant in todays thin-film solar cell production.
New Generation of Wet Process Equipment for Economic Processing of CdS/Alternative Buffer Layer for CIGS Solar Cells
Singulus Technologies presents a promising new development on the way to the efficient wet-chemical coating of thin-film solar modules made of copper-indium-gallium-diselenide (CIGS) on glass: the second generation of the TENUIS production line has a modular cluster build basis and enables both significant savings in terms of required floor space and the simultaneous one-side coating of two substrates. Singulus offers wet processing systems from R&D over pilot use to full production range 60, 120, 180 and more MW.
Due to new and unique concepts in terms of dosing and temperature control, Singulus` developers were successful in reducing the process time by up to 20 %, which has a positive effect and a considerably higher output in production.
Inline Wet Process Equipment, Etching, Cleaning & Single Side Coating for Thin-Film Solar Cells
The modular design of the SINGULUS inline wet process equipment VITRUM II allows the easy integration of different process steps according to the requirements of CIGS, a-Si or CdTe technology (etching, rear side and substrate edge etching, cleaning, and single side coating).
The design of the VITRUM II features similar piping for all liquid circuits and generously dimensioned installation compartments for optimized maintenance work.
The second generation VITRUM enables homogeneous, reliable and reproducible etching. It features further advantages in comparison to a dipping bath, such as a higher etch length and concentration, a higher process speed of up to 5 m/min, and minimized carryover.
The design of the VITRUM GEN 2 improves the accessibility for optimized maintenance work in a large installation cabinet. Piping is similar for all liquid circuits. It offers a high cycle rate and is also easy to integrate into existing production lines.
