With this system, GP Solar developed an expert system for wet chemical texturing of multi-silicon wafers. The texturing quality, classified on a scale ranging from 1 (untextured) to 5 (overetched), is now determined with complex analysis algorithms. For senior process engineers, this step has thus far only been assessable with a sample set.
The GP TEX-Q .Scan is a combination of experience concerning the optimization of wet chemical processes and the companys product line >GP Solar Inspect< in a compact measuring tool for process control. The inspection system can be integrated above or below of the reel or belt transport. The on-the-fly measurement has a throughput of one wafer per second and enables the continuous monitoring of the texturing process. Initial customer deliveries are planned for fall this year.
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