Expansion of the vacuum pump family


The new pumps have been developed for solar, glass coating, semiconductor and LCD etch applications. The fully integrated vacuum pumps are easy to install and offer a small footprint as a complete solution. An onboard controller eliminates the need for control unit rack mounting and a connection cable between the pump and control unit, which saves installation time, space and cost according to the company.

The design is compact and the size is compatible with previous models hence allowing a simple upgrade process. The STP-iXA3306 has a maximum pumping speed of 3200 liters per second and improved throughput performance at high gas flows. The STP-iXA2206 offers the same pumping speed of the earlier STP-A2203, yet the maximum throughput capability has been increased.

It features the latest-generation small power supply, which has been incorporated into the popular onboard controller first introduced with the STP-iXA2205 pump. It also includes a temperature management system option to minimize the formation of process-generated byproducts. The pump’s five-axis magnetic bearing system and new motor and drive system ensure long life and low operating costs with maintenance intervals as long as five years.