Singulus' ICP-PECVD tool Singular


The new product, Singular, is applied more and more for the development of PECVD coatings for high efficiency solar cells following conventional and new cell concepts.

Singular is a modular tool, consisting of several vacuum chambers which can be customized as the company states. Due to this high flexibility, new manufacturing processes for cell efficiencies above 20 percent can be developed on a manufacturing platform. This guarantees a fast and easy transfer to production according to the company.

The Singular tool is based on static in-line production, which combines the advantages of in-line substrate transport and static processing. It allows the coating of complex layer systems, such as layer stacks or gradients consisting of different materials. The process variability, the small tool footprint and high reliability guarantee high cell efficiencies, competitive total cost of ownership and high uptime according to the company.

The key feature of the machine is the ICP–PECVD technology. The inductively coupled plasma (ICP) excitation allows ideal control of film composition and density at high deposition rates.

The product will be present at the 26th EU PVSEC.

Stand: A4/C3