This proprietary technology (Patent WO2010115862-A1), based on the reduced pressure thermal diffusion of Boron Trichloride (BCl3), is the result of extensive development work for semiconductor and photovoltaic applications started in 2010 at the SemcoFabrication Laboratory, IRYSOLAR, and addresses todays market demand for cheaper and more efficient solar cells with no light induced degradation effect. i.e. n-type Silicon technology.
While far less costly and offering a much higher level of performance than liquid-source Boron Tribromide (BBr3) in terms of distribution, concentration and uniformity, gas-source BCl3 is unanimously recognized as a safer Boron precursor (less toxic and handled through standard gas cylinder and distribution system).
In addition, because of the release of Cl2 species during processing removing metal contaminants, thereby improving the cell performance the use of Boron Trichloride eliminates the need for Trans-LC cleans between runs which has a significant impact on the uptime and OPEX (CoO) in mass production.
The Semco Low-Pressure BCl3 process is fully compatible with the last self-passivation on P+ junction techniques that require the preservation of the BSG top layer with the aim of removing both the wet BSG removal and the barrier diffusion layers on n-type Bifacial manufacturing flow chart.
The Semco LYDOP BCl3 Low-Pressure diffusion furnace in connection with the Semco batch transport solution is a major technological leap for the solar industry and will ease adoption and mass manufacturing of cost-effective highly efficient n-type solar cells now.
