They offer temperature profiling that can be adjusted for both precision and flexibility. The mesh belt or pin chain transporter system offers up to three lanes with a safe transport through the oven.
In the mesh belt system, the heating and cooling zone conveyors can be separated. Therefore, no latent heat is carried into the cooling area. With belt speeds up to six meters per minute, the RDS series provides a throughput of up to 5,700 wafers per hour.
Rehms Condensate Residue Management System to control the buildup of unwanted paste solvent and vehicle residue in the process chamber is also available with the systems. The RFS firing system has flexible transport systems that enable single, dual and triple lane handling of wafers.
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