The process boats are automatically loaded and unloaded. There is a modular configuration and gentle handling with teachable servo axes.
The back-to-back loading unit is optimal and the boat changer is optimized to increase throughput by up to 20 percent. A total of 800 wafers per boat is possible.
This content is protected by copyright and may not be reused. If you want to cooperate with us and would like to reuse some of our content, please contact: email@example.com.