Sucessor CVD reactor


The new reactor has a much higher gas flow rate on the optimal capacity increase of 24 matched pair CVD reactors. The STC-TCS converters are also a part of the key equipments in silicon production.

Silicon production facilities that are currently equipped with the 18 pair reactors and converters can now switch to the 24 pair CVD reactor. With the 24 pair reactor, the production capacity from each reactor doubles.

The capacity increased from 175 tons to 350 tons. At the same time, the energy consumption decreases from 70 kilowatt hours per kilogram to 60 kilowatt hours per kilogram. The gas flow rate increases from 6,000 kilograms to 18,000 kilograms and again energy consumption decreases from 4.5 to 2.7 kilowatt hours per kilogram.